View source for Analog Devices, Inc. (20240253979). STRESS ISOLATION PROCESS

=STRESS ISOLATION PROCESS=


==Organization Name==

[[:Category:Analog Devices, Inc.|Analog Devices, Inc.]]


[[Category:Analog Devices, Inc.]]

==Inventor(s)==

[[:Category:Xin Zhang of Acton MA US|Xin Zhang of Acton MA US]][[Category:Xin Zhang of Acton MA US]]

[[:Category:Christopher Needham of Ipswich MA US|Christopher Needham of Ipswich MA US]][[Category:Christopher Needham of Ipswich MA US]]

[[:Category:Andrew Proudman of Stoneham MA US|Andrew Proudman of Stoneham MA US]][[Category:Andrew Proudman of Stoneham MA US]]

[[:Category:Nikolay Pokrovskiy of Billerica MA US|Nikolay Pokrovskiy of Billerica MA US]][[Category:Nikolay Pokrovskiy of Billerica MA US]]

[[:Category:George M. Molnar, Ii of Westford MA US|George M. Molnar, Ii of Westford MA US]][[Category:George M. Molnar, Ii of Westford MA US]]

[[:Category:Laura Cornelia Popa of Madison NJ US|Laura Cornelia Popa of Madison NJ US]][[Category:Laura Cornelia Popa of Madison NJ US]]

==STRESS ISOLATION PROCESS==


This abstract first appeared for US patent application 20240253979 titled 'STRESS ISOLATION PROCESS

==Original Abstract Submitted==

a stress-isolated microelectromechanical systems (mems) device and a method of manufacture of the stress-isolated mems device are provided. mems devices may be sensitive to stress and may provide lower performance when subjected to stress. a stress-isolated mems device may be manufactured by etching a trench and/or a cavity in a first side of a substrate and subsequently forming a mems device on a surface of a platform opposite the first side of the substrate. such a stress-isolated mems device may exhibit better performance than a mems device that is not stress-isolated. moreover, manufacturing the mems device by first forming a trench and cavity on a backside of a wafer, before forming the mems device on a suspended platform, provides increased yield and allows for fabrication of smaller parts, in at least some embodiments.



[[Category:B81C1/00]]
[[Category:B81B7/00]]
[[Category:CPC_B81C1/00325]]