View source for 20250218720. Method Wafer Groundin (ASML Netherlands B.V.)

= METHOD OF WAFER GROUNDING UTILIZING WAFER EDGE BACKSIDE COATING EXCLUSION AREA =

'''Abstract''':
systems and methods are provided for grounding a wafer in a charged particle beam apparatus. the systems and methods include providing an exclusion area in a backside film on the wafer of sufficient size to allow an electrical connection between the wafer and an electrical contact of the charged particle beam apparatus. the systems and methods include contacting a pin body to a surface of the wafer, the wafer having a coating on the surface, and the pin body comprising a first tip and a second tip each extending from the pin body; wherein the contacting takes place at a first exclusion area of the coating by any one of the first tip, the second tip, or any combination thereof.

'''Inventor(s)''': [[:Category:Yinglong LI of San Jose CA US|Yinglong LI]], [[:Category:Niels Johannes, Maria BOSCH of Eindhoven  NL|Niels Johannes, Maria BOSCH]], [[:Category:Jef GOOSSENS of Bocholt  BE|Jef GOOSSENS]], [[:Category:Aimin WU of Milpitas CA US|Aimin WU]], [[:Category:Humad ASGHAR of Milpitas CA US|Humad ASGHAR]], [[:Category:Tianming CHEN of San Jose CA US|Tianming CHEN]], [[:Category:Peter Paul HEMPENIUS of Eindhoven  NL|Peter Paul HEMPENIUS]], [[:Category:Xiang KE of San Jose CA US|Xiang KE]], [[:Category:Joan SANS MERCADER of Eindhoven  NL|Joan SANS MERCADER]], [[:Category:Zhi ZHANG of San Jose CA US|Zhi ZHANG]], [[:Category:Jan-Gerard Cornelis VAN DER TOORN of Eindhoven  NL|Jan-Gerard Cornelis VAN DER TOORN]]

'''CPC Classification''': [[:Category:CPC_H01J37/20|H01J37/20]] (Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support {(introducing the objects )})


[[Category:Patent Applications]]
[[Category:ASML Netherlands B.V.]]
[[Category:CPC_H01J37/20]]
[[Category:Yinglong LI of San Jose CA US]]
[[Category:Niels Johannes, Maria BOSCH of Eindhoven  NL]]
[[Category:Jef GOOSSENS of Bocholt  BE]]
[[Category:Aimin WU of Milpitas CA US]]
[[Category:Humad ASGHAR of Milpitas CA US]]
[[Category:Tianming CHEN of San Jose CA US]]
[[Category:Peter Paul HEMPENIUS of Eindhoven  NL]]
[[Category:Xiang KE of San Jose CA US]]
[[Category:Joan SANS MERCADER of Eindhoven  NL]]
[[Category:Zhi ZHANG of San Jose CA US]]
[[Category:Jan-Gerard Cornelis VAN DER TOORN of Eindhoven  NL]]

[https://wikipatents.org/index.php?search=20250218720+rejection&title=Special%3ASearch&wprov=acrw1_-1 Search for rejections for patent application number 20250218720]


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