View source for 20250215563. Method Process (Kokusai Electric)

= METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM =

'''Abstract''':
there is provided a technique that includes: (a) supplying a first processing gas to a substrate; (b) storing a second processing gas in a first reservoir while heating the second processing gas; (c) storing the second processing gas in a second reservoir different from the first reservoir while heating the second processing gas; (d) after (b), supplying the second processing gas from the first reservoir to the substrate; (e) after (c), supplying the second processing gas from the second reservoir to the substrate, (f) performing (a) and (d); (g) performing (a) and (e); and (h) forming a film on the substrate by performing a cycle that includes (f) and (g) a predetermined number of times.

'''Inventor(s)''': [[:Category:Takashi YOKOGAWA of Toyama-shi  JP|Takashi YOKOGAWA]]

'''CPC Classification''': [[:Category:CPC_C23C16/45527|C23C16/45527]] (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL  (making metal-coated products by extrusion ; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. , ; metallising of glass ; metallising mortars, concrete, artificial stone, ceramics or natural stone ; enamelling of, or applying a vitreous layer to, metals ; treating metal surfaces or coating of metals by electrolysis or electrophoresis ; single-crystal film growth ; by metallising textiles ; decorating textiles by locally metallising ))


[[Category:Patent Applications]]
[[Category:Kokusai Electric Corporation]]
[[Category:CPC_C23C16/45527]]
[[Category:Takashi YOKOGAWA of Toyama-shi  JP]]

[https://wikipatents.org/index.php?search=20250215563+rejection&title=Special%3ASearch&wprov=acrw1_-1 Search for rejections for patent application number 20250215563]


<!-- JSON-LD markup for search engines:
{"@context":"https://schema.org","@type":"TechArticle","headline":"20250215563. Method Process (Kokusai Electric)","name":"20250215563. Method Process (Kokusai Electric)","description":"Patent application abstract and classification for 20250215563 - Method Of Process","datePublished":"2025-07-03","mainEntity":{"@type":"GovernmentPermit","permitType":"Patent Application","identifier":"20250215563","name":"Method Of Process","additionalProperty":[{"@type":"PropertyValue","name":"Organization","value":"Kokusai Electric Corporation"}]}}
-->