View source for 20250183100. Method Determining Healt (EBARA)

= METHOD FOR DETERMINING HEALTH INDEX OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS =

'''Abstract''':
in a substrate processing apparatus comprising multiple modules, the state of health of the whole substrate processing apparatus is grasped. a method for determining a health index of a substrate processing apparatus is provided. the substrate processing apparatus comprises multiple module groups, and each module group comprises a single module or multiple modules. the method comprises steps for obtaining multiple operation parameter values relating to each of the modules in the substrate processing apparatus; determining a module state of each of the modules, based on the multiple operation parameter values; and determining a health index of the substrate processing apparatus, based on the module states of the modules and weight coefficients for the modules.

'''Inventor(s)''': [[:Category:Shaunak GHATPANDE of Tokyo  JP|Shaunak GHATPANDE]], [[:Category:Rohit KAWDE of Tokyo  JP|Rohit KAWDE]], [[:Category:Ryuya KOIZUMI of Tokyo  JP|Ryuya KOIZUMI]], [[:Category:Tensei SATO of Tokyo  JP|Tensei SATO]], [[:Category:Shunsuke KAGAYA of Tokyo  JP|Shunsuke KAGAYA]]

'''CPC Classification''': [[:Category:CPC_H01L22/10|H01L22/10]] ({Measuring as part of the manufacturing process  (burn-in )})


[[Category:Patent Applications]]
[[Category:EBARA CORPORATION]]
[[Category:CPC_H01L22/10]]
[[Category:Shaunak GHATPANDE of Tokyo  JP]]
[[Category:Rohit KAWDE of Tokyo  JP]]
[[Category:Ryuya KOIZUMI of Tokyo  JP]]
[[Category:Tensei SATO of Tokyo  JP]]
[[Category:Shunsuke KAGAYA of Tokyo  JP]]

[https://wikipatents.org/index.php?search=20250183100+rejection&title=Special%3ASearch&wprov=acrw1_-1 Search for rejections for patent application number 20250183100]


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