METHOD FOR DETERMINING HEALTH INDEX OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

Abstract: in a substrate processing apparatus comprising multiple modules, the state of health of the whole substrate processing apparatus is grasped. a method for determining a health index of a substrate processing apparatus is provided. the substrate processing apparatus comprises multiple module groups, and each module group comprises a single module or multiple modules. the method comprises steps for obtaining multiple operation parameter values relating to each of the modules in the substrate processing apparatus; determining a module state of each of the modules, based on the multiple operation parameter values; and determining a health index of the substrate processing apparatus, based on the module states of the modules and weight coefficients for the modules.

Inventor(s): Shaunak GHATPANDE, Rohit KAWDE, Ryuya KOIZUMI, Tensei SATO, Shunsuke KAGAYA

CPC Classification: H01L22/10 ({Measuring as part of the manufacturing process (burn-in )})

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