View source for 20250183065. Flange Apparatus P (ASM IP Holding B.V.)

= FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES =

'''Abstract''':
the disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. the flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. a material with a heat conductivity between 0.1 and 40 w/m k may be at least partially provided in between the cooling fluid and the rest of the flange.

'''Inventor(s)''': [[:Category:Jeroen de Jonge of Almere  NL|Jeroen de Jonge]], [[:Category:Sumit Sachdeva of Best  NL|Sumit Sachdeva]], [[:Category:Lucian Jdira of Nieuw Vennep  NL|Lucian Jdira]], [[:Category:Julien Laurentius Antonius Maria Keijser of Amersfoort  NL|Julien Laurentius Antonius Maria Keijser]], [[:Category:Theodorus G.M. Oosterlaken of Oudewater  NL|Theodorus G.M. Oosterlaken]]

'''CPC Classification''': [[:Category:CPC_H01L21/67109|H01L21/67109]] ({mainly by convection})


[[Category:Patent Applications]]
[[Category:ASM IP Holding B.V.]]
[[Category:CPC_H01L21/67109]]
[[Category:Jeroen de Jonge of Almere  NL]]
[[Category:Sumit Sachdeva of Best  NL]]
[[Category:Lucian Jdira of Nieuw Vennep  NL]]
[[Category:Julien Laurentius Antonius Maria Keijser of Amersfoort  NL]]
[[Category:Theodorus G.M. Oosterlaken of Oudewater  NL]]

[https://wikipatents.org/index.php?search=20250183065+rejection&title=Special%3ASearch&wprov=acrw1_-1 Search for rejections for patent application number 20250183065]


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