20250183065. Flange Apparatus P (ASM IP Holding B.V.)
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FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
Abstract: the disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. the flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. a material with a heat conductivity between 0.1 and 40 w/m k may be at least partially provided in between the cooling fluid and the rest of the flange.
Inventor(s): Jeroen de Jonge, Sumit Sachdeva, Lucian Jdira, Julien Laurentius Antonius Maria Keijser, Theodorus G.M. Oosterlaken
CPC Classification: H01L21/67109 ({mainly by convection})
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