FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES

Abstract: the disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. the flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. a material with a heat conductivity between 0.1 and 40 w/m k may be at least partially provided in between the cooling fluid and the rest of the flange.

Inventor(s): Jeroen de Jonge, Sumit Sachdeva, Lucian Jdira, Julien Laurentius Antonius Maria Keijser, Theodorus G.M. Oosterlaken

CPC Classification: H01L21/67109 ({mainly by convection})

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