View source for 20250174595. M (Taiwan Semiconductor Manufacturing ., .)

= METHODS AND SYSTEMS FOR IMPROVING FUSION BONDING =

'''Abstract''':
methods and systems for improving fusion bonding are disclosed. plasma treatment is performed on a substrate prior to the fusion bonding, which leaves residual charge on the substrate to be fusion bonded. the residual charge is usually dissipated through an electrically conductive silicone cushion on a loading pin. in the methods, the amount of residual voltage on a test silicon wafer is measured. if the residual voltage is too high, this indicates the usable lifetime of the silicone cushion has passed, and the electrically conductive silicone cushion is replaced. this ensures the continued dissipation of residual charge during use in production, improving the quality of fusion bonds between substrates.

'''Inventor(s)''': [[:Category:Hong-Ta Kuo of Hsinchu  TW|Hong-Ta Kuo]], [[:Category:Yen-Hao Huang of Hsinchu  TW|Yen-Hao Huang]], [[:Category:I-Shi Wang of Taipei  TW|I-Shi Wang]], [[:Category:Ming-Yi Shen of Miaoli  TW|Ming-Yi Shen]], [[:Category:Tzu-Ping Yang of Hsinchu  TW|Tzu-Ping Yang]], [[:Category:Hsing-Yu Wang of Hsinchu  TW|Hsing-Yu Wang]], [[:Category:Huang-Liang Lin of Hsinchu  TW|Huang-Liang Lin]], [[:Category:Yin-Tung Chou of Hsinchu  TW|Yin-Tung Chou]], [[:Category:Yuan-Hsin Chi of Taichung  TW|Yuan-Hsin Chi]], [[:Category:Sheng-Yuan Lin of Hsinchu  TW|Sheng-Yuan Lin]]

'''CPC Classification''': [[:Category:CPC_H01L24/80|H01L24/80]] ({Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected})


[[Category:Patent Applications]]
[[Category:Taiwan Semiconductor Manufacturing Co., Ltd.]]
[[Category:CPC_H01L24/80]]
[[Category:Hong-Ta Kuo of Hsinchu  TW]]
[[Category:Yen-Hao Huang of Hsinchu  TW]]
[[Category:I-Shi Wang of Taipei  TW]]
[[Category:Ming-Yi Shen of Miaoli  TW]]
[[Category:Tzu-Ping Yang of Hsinchu  TW]]
[[Category:Hsing-Yu Wang of Hsinchu  TW]]
[[Category:Huang-Liang Lin of Hsinchu  TW]]
[[Category:Yin-Tung Chou of Hsinchu  TW]]
[[Category:Yuan-Hsin Chi of Taichung  TW]]
[[Category:Sheng-Yuan Lin of Hsinchu  TW]]

[https://wikipatents.org/index.php?search=20250174595+rejection&title=Special%3ASearch&wprov=acrw1_-1 Search for rejections for patent application number 20250174595]


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