View source for 20250169117. Transistor Devices Wit (Applied Materials, .)

= TRANSISTOR DEVICES WITH MULTI-LAYER INTERLAYER DIELECTRIC STRUCTURES =

'''Abstract''':
a transistor device includes a channel region, a first source/drain region adjacent to a first end of the channel region and a second source/drain region adjacent to a second end of the channel region, a gate structure disposed on the channel region, the first source/drain region and the second source/drain region, and an interlayer dielectric (ild) structure disposed on the gate structure. the ild structure includes a first dielectric layer including a first set of sublayers. the first set of sublayers includes a first sublayer including a first dielectric material having a first hydrogen concentration and a second sublayer including the first dielectric material having a second hydrogen concentration lower than the first hydrogen concentration. the ild structure further includes a second dielectric layer including a second set of sublayers. the second set of sublayers includes a third sublayer including a second dielectric material different from the first dielectric material.

'''Inventor(s)''': [[:Category:Yun-Chu Tsai of San Jose CA US|Yun-Chu Tsai]], [[:Category:Dejiu Fan of Mountain View CA US|Dejiu Fan]], [[:Category:Jung Bae Kim of San Jose CA US|Jung Bae Kim]], [[:Category:Yang Ho Bae of San Jose CA US|Yang Ho Bae]], [[:Category:Rodney Shunleong Lim of Daly City CA US|Rodney Shunleong Lim]], [[:Category:Dong Kil Yim of Pleasanton CA US|Dong Kil Yim]]

'''CPC Classification''': [[:Category:CPC_H10D30/6757|H10D30/6757]] (No explanation available)


[[Category:Patent Applications]]
[[Category:Applied Materials, Inc.]]
[[Category:CPC_H10D30/6757]]
[[Category:Yun-Chu Tsai of San Jose CA US]]
[[Category:Dejiu Fan of Mountain View CA US]]
[[Category:Jung Bae Kim of San Jose CA US]]
[[Category:Yang Ho Bae of San Jose CA US]]
[[Category:Rodney Shunleong Lim of Daly City CA US]]
[[Category:Dong Kil Yim of Pleasanton CA US]]

[https://wikipatents.org/index.php?search=20250169117+rejection&title=Special%3ASearch&wprov=acrw1_-1 Search for rejections for patent application number 20250169117]


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