View source for 20250166967. Systems Methods F (Lam Research)

= SYSTEMS AND METHODS FOR REDUCING VARIABILITY IN FEATURES OF A SUBSTRATE =

'''Abstract''':
a method for reducing variability between features of a substrate is described. the method includes generating, by a single radio frequency (rf) generator, an rf signal. the method further includes modifying, by the single rf generator, the rf signal to alternate among three states or four states for a time period.

'''Inventor(s)''': [[:Category:Sriharsha Jayanti of Fremont CA US|Sriharsha Jayanti]], [[:Category:Gerardo Delgadino of Milpitas CA US|Gerardo Delgadino]], [[:Category:Merrett Wong of San Carlos CA US|Merrett Wong]]

'''CPC Classification''': [[:Category:CPC_H01J37/32146|H01J37/32146]] (Gas-filled discharge tubes  (heating by discharge ))


[[Category:Patent Applications]]
[[Category:Lam Research Corporation]]
[[Category:CPC_H01J37/32146]]
[[Category:Sriharsha Jayanti of Fremont CA US]]
[[Category:Gerardo Delgadino of Milpitas CA US]]
[[Category:Merrett Wong of San Carlos CA US]]

[https://wikipatents.org/index.php?search=20250166967+rejection&title=Special%3ASearch&wprov=acrw1_-1 Search for rejections for patent application number 20250166967]


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