SYSTEMS AND METHODS FOR REDUCING VARIABILITY IN FEATURES OF A SUBSTRATE

Abstract: a method for reducing variability between features of a substrate is described. the method includes generating, by a single radio frequency (rf) generator, an rf signal. the method further includes modifying, by the single rf generator, the rf signal to alternate among three states or four states for a time period.

Inventor(s): Sriharsha Jayanti, Gerardo Delgadino, Merrett Wong

CPC Classification: H01J37/32146 (Gas-filled discharge tubes (heating by discharge ))

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