View source for 18973637. FILM FORMING APPARATUS (Tokyo Electron Limited)

=FILM FORMING APPARATUS=


==Organization Name==

[[:Category:Tokyo Electron Limited|Tokyo Electron Limited]]


[[Category:Tokyo Electron Limited]]

==Inventor(s)==

[[:Category:Ryohei Takaki of Yamanashi JP|Ryohei Takaki of Yamanashi JP]][[Category:Ryohei Takaki of Yamanashi JP]]

[[:Category:Hiroo Kawasaki of Yamanashi JP|Hiroo Kawasaki of Yamanashi JP]][[Category:Hiroo Kawasaki of Yamanashi JP]]

==FILM FORMING APPARATUS==


This abstract first appeared for US patent application 18973637 titled 'FILM FORMING APPARATUS

==Original Abstract Submitted==

A film forming apparatus includes: a processing container, a stage provided in the processing container in a liftable and lowerable manner; a shower head facing the stage and having a plurality of gas holes, a lifting and lowering mechanism configured to lift the stage when film formation is to be performed to form a processing space between the shower head and the stage, and a measurer configured to measure a gap between the shower head and the stage.



[[Category:C23C16/455]]
[[Category:C23C16/44]]
[[Category:C23C16/52]]
[[Category:CPC_C23C16/45544]]