18973637. FILM FORMING APPARATUS (Tokyo Electron Limited)
FILM FORMING APPARATUS
Organization Name
Inventor(s)
Hiroo Kawasaki of Yamanashi JP
FILM FORMING APPARATUS
This abstract first appeared for US patent application 18973637 titled 'FILM FORMING APPARATUS
Original Abstract Submitted
A film forming apparatus includes: a processing container, a stage provided in the processing container in a liftable and lowerable manner; a shower head facing the stage and having a plurality of gas holes, a lifting and lowering mechanism configured to lift the stage when film formation is to be performed to form a processing space between the shower head and the stage, and a measurer configured to measure a gap between the shower head and the stage.