View source for 18749793. MASK QUALITY MANAGEMENT SYSTEM (Samsung Display Co., Ltd.)

=MASK QUALITY MANAGEMENT SYSTEM=


==Organization Name==

[[:Category:Samsung Display Co., Ltd.|Samsung Display Co., Ltd.]]


[[Category:Samsung Display Co., Ltd.]]

==Inventor(s)==

[[:Category:SUNGMIN Hur of Yongin-si KR|SUNGMIN Hur of Yongin-si KR]][[Category:SUNGMIN Hur of Yongin-si KR]]

[[:Category:HYENG-WOO Cho of Yongin-si KR|HYENG-WOO Cho of Yongin-si KR]][[Category:HYENG-WOO Cho of Yongin-si KR]]

==MASK QUALITY MANAGEMENT SYSTEM==


This abstract first appeared for US patent application 18749793 titled 'MASK QUALITY MANAGEMENT SYSTEM

==Original Abstract Submitted==

A mask quality management system includes a mask including a mask frame and a plurality of mask sheets, wherein the mask sheets are fixed to an upper surface of the mask frame and disposed to be spaced apart from each other, a stage on which the mask is seated, and a first module disposed on the stage and measuring a sagging degree of the mask sheet from the mask frame by irradiating an intense light to the mask.



[[Category:G03F1/84]]
[[Category:G03F7/00]]
[[Category:CPC_G03F1/84]]