18749793. MASK QUALITY MANAGEMENT SYSTEM (Samsung Display Co., Ltd.)
MASK QUALITY MANAGEMENT SYSTEM
Organization Name
Inventor(s)
MASK QUALITY MANAGEMENT SYSTEM
This abstract first appeared for US patent application 18749793 titled 'MASK QUALITY MANAGEMENT SYSTEM
Original Abstract Submitted
A mask quality management system includes a mask including a mask frame and a plurality of mask sheets, wherein the mask sheets are fixed to an upper surface of the mask frame and disposed to be spaced apart from each other, a stage on which the mask is seated, and a first module disposed on the stage and measuring a sagging degree of the mask sheet from the mask frame by irradiating an intense light to the mask.