View source for 18464759. MEMS DEVICE AND MANUFACTURING METHOD THEREOF simplified abstract (ROHM CO., LTD.)

=MEMS DEVICE AND MANUFACTURING METHOD THEREOF=


==Organization Name==

[[:Category:ROHM CO., LTD.|ROHM CO., LTD.]]


[[Category:ROHM CO., LTD.]]

==Inventor(s)==

[[:Category:Martin Wilfried Heller of Kyoto (JP)|Martin Wilfried Heller of Kyoto (JP)]][[Category:Martin Wilfried Heller of Kyoto (JP)]]

[[:Category:Daisuke Kaminishi of Kyoto (JP)|Daisuke Kaminishi of Kyoto (JP)]][[Category:Daisuke Kaminishi of Kyoto (JP)]]

==MEMS DEVICE AND MANUFACTURING METHOD THEREOF - A simplified explanation of the abstract==


This abstract first appeared for US patent application 18464759 titled 'MEMS DEVICE AND MANUFACTURING METHOD THEREOF

==Simplified Explanation==

The present disclosure provides a MEMS device. The MEMS device includes: a substrate; a recess, disposed in the substrate; a movable portion, hollowly supported in the recess; and an isolation joint, inserted into a predetermined position of the movable portion and electrically insulating both sides of the movable portion. A shortest distance between a bottom of the recess and the movable portion is less than a distance between the bottom of the recess and the isolation joint.

* MEMS device with a movable portion supported in a recess
* Isolation joint electrically insulating the movable portion
* Specific distance requirements between components for optimal functionality

== Potential Applications ==
The MEMS device can be used in:
* Accelerometers
* Gyroscopes
* Pressure sensors

== Problems Solved ==
* Electrical interference between components
* Mechanical stability of the movable portion

== Benefits ==
* Improved accuracy and sensitivity
* Reduced risk of malfunction due to electrical shorts

== Potential Commercial Applications ==
Optimizing MEMS devices for:
* Consumer electronics
* Automotive sensors

== Possible Prior Art ==
Prior art may include:
* MEMS devices with similar isolation joint configurations
* Research on improving MEMS device performance

== Unanswered Questions ==
=== How does the isolation joint impact the overall durability of the MEMS device? ===
The article does not delve into the long-term effects of the isolation joint on the device's lifespan.

=== Are there any limitations to the specific distance requirements mentioned in the abstract? ===
The article does not discuss any potential drawbacks or challenges related to maintaining these distances in manufacturing processes.


==Original Abstract Submitted==

The present disclosure provides a MEMS device. The MEMS device includes: a substrate; a recess, disposed in the substrate; a movable portion, hollowly supported in the recess; and an isolation joint, inserted into a predetermined position of the movable portion and electrically insulating both sides of the movable portion. A shortest distance between a bottom of the recess and the movable portion is less than a distance between the bottom of the recess and the isolation joint.



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