View source for 18256952. MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE simplified abstract (Robert Bosch GmbH)

=MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE=


==Organization Name==

[[:Category:Robert Bosch GmbH|Robert Bosch GmbH]]


[[Category:Robert Bosch GmbH]]

==Inventor(s)==

[[:Category:Ferenc Lukacs of Budapest (HU)|Ferenc Lukacs of Budapest (HU)]][[Category:Ferenc Lukacs of Budapest (HU)]]

[[:Category:Mate Erdosi of Dunakeszi (HU)|Mate Erdosi of Dunakeszi (HU)]][[Category:Mate Erdosi of Dunakeszi (HU)]]

[[:Category:Raschid Baraki of Reutlingen (DE)|Raschid Baraki of Reutlingen (DE)]][[Category:Raschid Baraki of Reutlingen (DE)]]

[[:Category:Sophielouise Mach of Reutlingen (DE)|Sophielouise Mach of Reutlingen (DE)]][[Category:Sophielouise Mach of Reutlingen (DE)]]

[[:Category:Thomas Friedrich of Moessingen-Oeschingen (DE)|Thomas Friedrich of Moessingen-Oeschingen (DE)]][[Category:Thomas Friedrich of Moessingen-Oeschingen (DE)]]

[[:Category:Volkmar Senz of Metzingen (DE)|Volkmar Senz of Metzingen (DE)]][[Category:Volkmar Senz of Metzingen (DE)]]

==MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE - A simplified explanation of the abstract==


This abstract first appeared for US patent application 18256952 titled 'MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE

==Simplified Explanation==

The abstract of the patent application describes a micromechanical component that includes a substrate, a frame structure, at least one electrode, a pressure-sensitive membrane, and a sealed cavity. The self-supporting area of the membrane has local reinforcement structures to increase its thickness.

* The micromechanical component consists of a substrate, a frame structure, at least one electrode, a pressure-sensitive membrane, and a sealed cavity.
* The frame structure frames a partial surface of the substrate and/or an interlayer applied to the substrate.
* At least one electrode is mounted on the framed partial surface and/or interlayer.
* The pressure-sensitive membrane is subjected to external pressure, causing deformation.
* The self-supporting area of the membrane spans the framed partial surface and/or interlayer.
* The self-supporting area has at least one movable counterelectrode directed towards the framed partial surface and/or interlayer.
* The sealed cavity, surrounded by the membrane and frame structure, has a reference pressure.
* The self-supporting area of the membrane includes local reinforcement structures to increase its thickness in specific regions where the membrane thickness changes.

Potential Applications:
* Pressure sensors
* Microphones
* Accelerometers
* Force sensors
* Biomedical devices

Problems Solved:
* Provides a reliable and sensitive micromechanical component for measuring pressure or force.
* Enhances the structural integrity of the pressure-sensitive membrane in regions with varying thickness.

Benefits:
* Improved accuracy and sensitivity in pressure or force measurements.
* Increased durability and reliability of the micromechanical component.
* Enables miniaturization and integration of pressure-sensitive devices into various applications.


==Original Abstract Submitted==

A micromechanical component. The micromechanical component includes: a substrate; a frame structure which frames a partial surface of the substrate and/or an interlayer applied to the substrate, at least one electrode being mounted on the framed partial surface and/or interlayer; a pressure-sensitive membrane on which an external pressure acts and which brings about a deformation, wherein a self-supporting area of the membrane spans the framed partial surface and/or interlayer, the self-supporting area having at least one movable counterelectrode directed toward the framed partial surface and/or interlayer; and a sealed cavity having a reference pressure, surrounded by the membrane and the frame structure; wherein the self-supporting area of the membrane has local reinforcement structures for increasing a membrane thickness of the self-supporting area, the local reinforcement structures being mounted in particular regions of the self-supporting area where the membrane thickness of the self-supporting area changes.



[[Category:G01L9/00]]
[[Category:G01L19/06]]