View source for 18256952. MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE simplified abstract (Robert Bosch GmbH)

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Return to 18256952. MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE simplified abstract (Robert Bosch GmbH).