18256952. MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE simplified abstract (Robert Bosch GmbH)

MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE

Organization Name

Robert Bosch GmbH

Inventor(s)

Ferenc Lukacs of Budapest (HU)

Mate Erdosi of Dunakeszi (HU)

Raschid Baraki of Reutlingen (DE)

Sophielouise Mach of Reutlingen (DE)

Thomas Friedrich of Moessingen-Oeschingen (DE)

Volkmar Senz of Metzingen (DE)

MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18256952 titled 'MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE

Simplified Explanation

The abstract of the patent application describes a micromechanical component that includes a substrate, a frame structure, at least one electrode, a pressure-sensitive membrane, and a sealed cavity. The self-supporting area of the membrane has local reinforcement structures to increase its thickness.

• The micromechanical component consists of a substrate, a frame structure, at least one electrode, a pressure-sensitive membrane, and a sealed cavity.
• The frame structure frames a partial surface of the substrate and/or an interlayer applied to the substrate.
• At least one electrode is mounted on the framed partial surface and/or interlayer.
• The pressure-sensitive membrane is subjected to external pressure, causing deformation.
• The self-supporting area of the membrane spans the framed partial surface and/or interlayer.
• The self-supporting area has at least one movable counterelectrode directed towards the framed partial surface and/or interlayer.
• The sealed cavity, surrounded by the membrane and frame structure, has a reference pressure.
• The self-supporting area of the membrane includes local reinforcement structures to increase its thickness in specific regions where the membrane thickness changes.

Potential Applications:

• Pressure sensors
• Microphones
• Accelerometers
• Force sensors
• Biomedical devices

Problems Solved:

• Provides a reliable and sensitive micromechanical component for measuring pressure or force.
• Enhances the structural integrity of the pressure-sensitive membrane in regions with varying thickness.

Benefits:

• Improved accuracy and sensitivity in pressure or force measurements.
• Increased durability and reliability of the micromechanical component.
• Enables miniaturization and integration of pressure-sensitive devices into various applications.

Original Abstract Submitted

A micromechanical component. The micromechanical component includes: a substrate; a frame structure which frames a partial surface of the substrate and/or an interlayer applied to the substrate, at least one electrode being mounted on the framed partial surface and/or interlayer; a pressure-sensitive membrane on which an external pressure acts and which brings about a deformation, wherein a self-supporting area of the membrane spans the framed partial surface and/or interlayer, the self-supporting area having at least one movable counterelectrode directed toward the framed partial surface and/or interlayer; and a sealed cavity having a reference pressure, surrounded by the membrane and the frame structure; wherein the self-supporting area of the membrane has local reinforcement structures for increasing a membrane thickness of the self-supporting area, the local reinforcement structures being mounted in particular regions of the self-supporting area where the membrane thickness of the self-supporting area changes.