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Category:H01J37/24
Subcategories
This category has the following 3 subcategories, out of 3 total.
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Pages in category "H01J37/24"
The following 5 pages are in this category, out of 5 total.
1
- 18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- 18498813. MULTI-PARAMETER IMPLANTATION FOR MANAGING WAFER DISTORTION (Applied Materials, Inc.)
- 18967559. High-Frequency Power Supply, Plasma Processing Device, and Matching Method (Tokyo Electron Limited)