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Category:F27D5/00
Pages in category "F27D5/00"
The following 8 pages are in this category, out of 8 total.
1
- 17889035. WAFER BAKING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
- 18087255. SUBSTRATE SUPPORTS AND TRANSFER APPARATUS FOR SUBSTRATE DEFORMATION simplified abstract (Applied Materials, Inc.)
- 18665683. HEATER ASSEMBLY WITH PROCESS GAP CONTROL FOR BATCH PROCESSING CHAMBERS simplified abstract (Applied Materials, Inc.)
- 18666710. HEATER LIFT ASSEMBLY SPRING DAMPER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)