US Patent Application 17749051. TRANSFER BLADE FOR ROBOT simplified abstract
TRANSFER BLADE FOR ROBOT
Organization Name
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Inventor(s)
Sheng-Yuan Lin of Hsinchu (TW)
Hung-Chih Wang of Hsinchu (TW)
TRANSFER BLADE FOR ROBOT - A simplified explanation of the abstract
This abstract first appeared for US patent application 17749051 titled 'TRANSFER BLADE FOR ROBOT
Simplified Explanation
- The patent application is for a transfer blade used in a manufacturing process. - The transfer blade has three segments: a first end segment, an intermediate segment, and a second end segment. - The first end segment has a contact region, as does the second end segment. - These contact regions are designed to touch specific areas of a workpiece's surface that are not sensitive. - The sensitive area of the workpiece could be an EUV frame or a reticle. - The transfer blade also has a non-contact region that runs continuously along all three segments. - This non-contact region overlaps with the sensitive area of the workpiece but does not touch it. - The purpose of the transfer blade is to safely transfer the workpiece without damaging the sensitive area.
Original Abstract Submitted
The present disclosure is directed to a transfer blade including a first end segment, a second end segment opposite to the first end segment, and an intermediate segment extending from the first end segment to the second end segment. The first end segment includes a first contact region and the second end segment includes a second contact region. The first and second contact regions are configured to contact locations of a surface of a workpiece that do not overlap or are not aligned with a sensitive area of the workpiece. The sensitive area of the workpiece may be an EUV frame or a reticle of the workpiece. A non-contact region extends continuously along the first end segment, the intermediate segment, and the second end segment, and the non-contact region overlaps the sensitive area of the workpiece and is spaced apart from the sensitive area of the workpiece.