Tokyo electron limited (20250129475). MULTIPLE INPUT POST MIX SHOWERHEAD
MULTIPLE INPUT POST MIX SHOWERHEAD
Organization Name
Inventor(s)
Norman Jacobson of Albany NY US
Kandabara Tapily of Mechanicsville NY US
MULTIPLE INPUT POST MIX SHOWERHEAD
This abstract first appeared for US patent application 20250129475 titled 'MULTIPLE INPUT POST MIX SHOWERHEAD
Original Abstract Submitted
aspects of the present disclosure provide an apparatus, which includes first gas channels distributing a first process gas and second gas channels alternating with the first gas channels and distributing a second process gas. the apparatus further includes first feed tubes each including first outlets configured to deliver the first process gas to a row of the first gas channels via the first outlets along different first flow paths of a same first length, and second feed tubes each including second outlets corresponding to a row of the second gas channels and configured to deliver the second process gas to the row of the second gas channels via the second outlets along different second flow paths of a same second length. the apparatus further includes vertical gas conduits each vertically extending from a respective one of the array of gas channels configured to transmit the first or second process gas.