Tokyo Electron Limited patent applications published on February 13th, 2025

Patent applications for Tokyo Electron Limited on February 13th, 2025

HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM (18789854)

Main Inventor

Teruhiko KODAMA

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (18933255)

Main Inventor

Yuta NAKANE

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD (18788436)

Main Inventor

Yudai FUKUSHI

TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS (18795054)

Main Inventor

Hisashi INOUE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD (18722860)

Main Inventor

Takumi HONDA

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD (18720641)

Main Inventor

Tatsuya NAGAMATSU

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD (18927144)

Main Inventor

Norihiko AMIKURA

FULLY SELF-ALIGNED VIA WITH GRAPHENE CAP (18366492)

Main Inventor

Kandabara Tapily

Release Layer for IR Laser Lift-Off Process (18797894)

Main Inventor

Panupong JAIPAN

SEMICONDUCTOR DEVICES WITH VERTICAL TRANSISTORS AND FERROELECTRIC CAPACITORS (18448086)

Main Inventor

Henry Jim FULFORD