Texas instruments incorporated (20250096768). METAL RIBS IN ELECTROMECHANICAL DEVICES
METAL RIBS IN ELECTROMECHANICAL DEVICES
Organization Name
texas instruments incorporated
Inventor(s)
Anindya Poddar of Sunnyvale CA US
Masamitsu Matsuura of Beppu JP
METAL RIBS IN ELECTROMECHANICAL DEVICES
This abstract first appeared for US patent application 20250096768 titled 'METAL RIBS IN ELECTROMECHANICAL DEVICES
Original Abstract Submitted
in examples, a device comprises a semiconductor die, a thin-film layer, and an air cavity positioned between the semiconductor die and the thin-film layer. the air cavity comprises a resonator positioned on the semiconductor die. a rib couples to a surface of the thin-film layer opposite the air cavity.
