Taiwan semiconductor manufacturing company, ltd. (20250151376). DEVICE INCLUDING MIM CAPACITOR AND RESISTOR

DEVICE INCLUDING MIM CAPACITOR AND RESISTOR

Organization Name

taiwan semiconductor manufacturing company, ltd.

Inventor(s)

Chen-Hsiang Hung of Hsin-Chu TW

Li-Hsin Chu of New Taipei City TW

Chia-Ping Lai of Hsinchu City TW

Chung-Chuan Tseng of Hsinchu City TW

DEVICE INCLUDING MIM CAPACITOR AND RESISTOR

This abstract first appeared for US patent application 20250151376 titled 'DEVICE INCLUDING MIM CAPACITOR AND RESISTOR

Original Abstract Submitted

a method of making a semiconductor device, includes: providing a first dielectric layer; sequentially forming a first metal layer, a dummy capacitor dielectric layer, and a second metal layer over the first dielectric layer; and using a single mask layer with two patterns to simultaneously recess two portions of the second metal layer so as to define a metal thin film of a resistor and a top metal plate of a capacitor.