SEMICONDUCTOR DEVICE STRUCTURE

Organization Name

taiwan semiconductor manufacturing company, ltd.

Inventor(s)

An-Hung Tai of Hsinchu County TW

Jian-Hao Chen of Hsinchu City TW

Hui-Chi Chen of Zhudong Township TW

Kuo-Feng Yu of Zhudong Township TW

SEMICONDUCTOR DEVICE STRUCTURE

This abstract first appeared for US patent application 20250151330 titled 'SEMICONDUCTOR DEVICE STRUCTURE

Original Abstract Submitted

a semiconductor device structure is provided. the semiconductor device structure includes a substrate. the semiconductor device structure includes a gate stack over the substrate. the semiconductor device structure includes a cap layer over the gate stack. the semiconductor device structure includes a protective layer over the cap layer. a lower portion of the protective layer extends into the cap layer. the semiconductor device structure includes a contact structure passing through the protective layer and the cap layer.