Taiwan semiconductor manufacturing company, ltd. (20250069944). SCREWLESS SEMICONDUCTOR PROCESSING CHAMBERS
SCREWLESS SEMICONDUCTOR PROCESSING CHAMBERS
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Yan-Hong Liu of Hsinchu County (TW)
Che-Fu Chen of Hsinchu City (TW)
SCREWLESS SEMICONDUCTOR PROCESSING CHAMBERS
This abstract first appeared for US patent application 20250069944 titled 'SCREWLESS SEMICONDUCTOR PROCESSING CHAMBERS
Original Abstract Submitted
in an embodiment, a system includes: a gas distributor assembly configured to dispense gas into a chamber; and a chuck assembly configured to secure a wafer within the chamber, wherein at least one of the gas distributor assembly and the chuck assembly includes: a first portion comprising a convex protrusion, and a second portion comprising a concave opening, wherein the convex protrusion is configured to engage the concave opening.