Taiwan semiconductor manufacturing company, ltd. (20250069906). FITTINGS FOR WAFER CLEANING SYSTEMS
FITTINGS FOR WAFER CLEANING SYSTEMS
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Cheng-Ping Chen of Taichung (TW)
Ping-Shen Chou of Hsinchu (TW)
Tsung-Lung Lai of Hsinchu (TW)
Ching-Wen Cheng of Zhubei (TW)
FITTINGS FOR WAFER CLEANING SYSTEMS
This abstract first appeared for US patent application 20250069906 titled 'FITTINGS FOR WAFER CLEANING SYSTEMS
Original Abstract Submitted
a fitting for an upper brush in a double brush scrubbing chamber of a wafer cleaning system is disclosed. the fitting includes a base plate, a flanged pipe, and a threaded connector. the base plate includes a threaded hole with a stop surface therein and a channel extending from the stop surface through a lower surface of the base plate. the flanged pipe is inserted into the base plate such that the flange at the top end of a hollow tube rests on the stop surface and the hollow tube passes through the channel of the base plate. the threaded connector has a passage therethrough, and engages the threaded hole of the base plate to fix the flanged pipe in place. this structure is able to provide fluid while minimizing particle generation.