Taiwan semiconductor manufacturing company, ltd. (20250015166). SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING
SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING
This abstract first appeared for US patent application 20250015166 titled 'SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING
Original Abstract Submitted
semiconductor devices and methods of fabrication are provided. a method includes providing a semiconductor structure with a first sidewall distanced from a second sidewall, fins located between the first sidewall and the second sidewall, and isolation regions located between the first sidewall and the second sidewall, wherein adjacent fins are separated by a respective isolation region. the method further includes performing a plasma etching process to etch the fins and the isolation regions, wherein the plasma etching process chemically etches the fins, wherein the plasma etching process physically etches the isolation regions to recesses defining a crown-shaped depth profile.