Taiwan semiconductor manufacturing company, ltd. (20250006639). SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Chi-Yuan Kuo of New Taipei City TW
Jia-Heng Zhu of Chiayi County TW
I-Chih Ni of New Taipei City TW
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
This abstract first appeared for US patent application 20250006639 titled 'SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Original Abstract Submitted
a method includes loading a wafer having a dielectric layer thereon into a processing chamber; introducing a hydrocarbon precursor into the processing chamber; pyrolyzing the hydrocarbon precursor; introducing the pyrolyzed hydrocarbon precursor to the dielectric layer to form a graphene layer on the dielectric layer at a temperature lower than about 400� c.