WAFER TRANSPORT CONTAINER

Organization Name

taiwan semiconductor manufacturing company, ltd.

Inventor(s)

WAFER TRANSPORT CONTAINER - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240282610 titled 'WAFER TRANSPORT CONTAINER

Simplified Explanation: The wafer transport carrier in this patent application is designed to reduce air leakage and prevent contamination from entering, ultimately improving the quality of semiconductor fabrication processes.

Key Features and Innovation:

Housing with a hollow shell containing a vacuum or inert gas to minimize humidity and oxygen ingress.
Integrated wafer rack to prevent air leakage around the rack.
Enhanced magnet-based door latch for improved air sealing around the housing opening.

Potential Applications: This technology can be applied in semiconductor fabrication facilities to enhance the quality of wafer transport and reduce defects in wafers and devices.

Problems Solved: The technology addresses issues related to air leakage, contamination, and humidity ingress in wafer transport carriers, which can lead to defects in semiconductor wafers and device failures.

Benefits:

Improved air sealing to prevent contamination.
Enhanced quality control in semiconductor fabrication.
Reduction in wafer defects and device failures.

Commercial Applications: The technology can be utilized in semiconductor manufacturing companies to enhance the efficiency and reliability of wafer transport processes, leading to improved product quality and reduced production costs.

Questions about Wafer Transport Carrier Technology: 1. How does the integrated wafer rack help prevent air leakage in the wafer transport carrier? 2. What are the specific benefits of using a vacuum or inert gas in the housing of the wafer transport carrier?

Frequently Updated Research: Ongoing research in the field of semiconductor fabrication focuses on improving wafer transport technologies to enhance overall production efficiency and product quality.

By implementing this innovative wafer transport carrier design, semiconductor manufacturers can significantly improve their production processes and reduce the risk of wafer defects and device failures.

Original Abstract Submitted

a wafer transport carrier includes various components to provide improved air sealing to reduce air leakage into the wafer transport carrier. the wafer transport carrier may include a housing having a hollow shell that contains a vacuum or an inert gas to minimize and/or prevent humidity and oxygen ingress into the wafer transport carrier, a wafer rack that is integrated into the shell of the housing to minimize and/or prevent air leakage around the wafer rack, and/or an enhanced magnet-based door latch to provide air sealing around the full perimeter of the opening of the housing. these components and/or additional components described herein may reduce and/or prevent debris, moisture, and/or other types of contamination from the semiconductor fabrication facility from entering the wafer transport carrier and causing wafer defects and/or device failures.