Taiwan semiconductor manufacturing company, ltd. (20240258311). SEMICONDUCTOR DEVICE HAVING NANOSHEETS
SEMICONDUCTOR DEVICE HAVING NANOSHEETS
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Jiann-Tyng Tzeng of Hsinchu TW
SEMICONDUCTOR DEVICE HAVING NANOSHEETS
This abstract first appeared for US patent application 20240258311 titled 'SEMICONDUCTOR DEVICE HAVING NANOSHEETS
Original Abstract Submitted
disclosed are semiconductor devices including a substrate, a first transistor formed over a first portion of the substrate, wherein the first transistor comprises a first nanosheet stack including n nanosheets and a second transistor over a second portion of the substrate, wherein the second transistor comprises a second nanosheet stack including m nanosheets, wherein n is different from m in which the first and second nanosheet stacks are formed on first and second substrate regions that are vertically offset from one another.