Taiwan semiconductor manufacturing company, ltd. (20240258072). RADIO FREQUENCY MATCH STRAP ASSEMBLY
RADIO FREQUENCY MATCH STRAP ASSEMBLY
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Yuan-Hsin Chi of Longjing Township TW
RADIO FREQUENCY MATCH STRAP ASSEMBLY
This abstract first appeared for US patent application 20240258072 titled 'RADIO FREQUENCY MATCH STRAP ASSEMBLY
Original Abstract Submitted
a radio frequency (rf) match assembly for a chemical vapor deposition processing chamber. the assembly includes a top electrically insulating column and a bottom electrically insulating column. the assembly further includes a one-piece rf match strap that has a head, a main body and a body extension. the main body of the one-piece rf match strap is configured to extend through the top electrically insulating column and the bottom electrically insulating column. a flexible chamber lid strap connects the processing chamber to the top of the one-piece rf match strap.