PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER

Organization Name

taiwan semiconductor manufacturing co., ltd.

Inventor(s)

Chih-Kuo Chang of Hsinchu County TW

Cheng-Lung Wu of Zhunan Township TW

Ting-Yau Shiu of Taoyuan City TW

Wei-Chen Lee of Zhubei City TW

Yang-Ann Chu of Hsinchu City TW

Jiun-Rong Pai of Jhubei City TW

PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER

This abstract first appeared for US patent application 20250125176 titled 'PORTABLE ROBOTIC SEMICONDUCTOR POD LOADER

Original Abstract Submitted

a portable robotic semiconductor pod loader may detect, with at least one sensor, receipt of a semiconductor pod on a load port of the portable robotic semiconductor pod loader. the at least one sensor is supported by the load port. the portable robotic semiconductor pod loader may cause a robot, of the portable robotic semiconductor pod loader, to align with the semiconductor pod provided on the load port. the portable robotic semiconductor pod loader may cause the robot to attach to the semiconductor pod, and may cause the robot to provide the semiconductor pod from the load port to a staging area of a semiconductor processing tool.