Taiwan semiconductor manufacturing co., ltd. (20250123572). MACHINE LEARNING ON OVERLAY MANAGEMENT
MACHINE LEARNING ON OVERLAY MANAGEMENT
Organization Name
taiwan semiconductor manufacturing co., ltd.
Inventor(s)
Chien Rhone Wang of Hsinchu TW
MACHINE LEARNING ON OVERLAY MANAGEMENT
This abstract first appeared for US patent application 20250123572 titled 'MACHINE LEARNING ON OVERLAY MANAGEMENT
Original Abstract Submitted
the current disclosure describes techniques for managing vertical alignment or overlay in semiconductor manufacturing using machine learning. alignments of interconnection features in a fan-out wlp process are evaluated and managed through the disclosed techniques. big data and machine learning are used to train a classification that correlates the overlay error source factors with overlay metrology categories. the overlay error source factors include tool signals. the trained classification includes a base classification and a meta classification.