Taiwan semiconductor manufacturing co., ltd. (20250118585). CALIBRATION HARDWARE FOR ION IMPLANTER
CALIBRATION HARDWARE FOR ION IMPLANTER
Organization Name
taiwan semiconductor manufacturing co., ltd.
Inventor(s)
Hsin-Sheng Liang of Hsinchu TW
CALIBRATION HARDWARE FOR ION IMPLANTER
This abstract first appeared for US patent application 20250118585 titled 'CALIBRATION HARDWARE FOR ION IMPLANTER
Original Abstract Submitted
a horizontally oriented calibration jig for a wafer gripper arm of an ion implanter is disclosed. the calibration jig is mounted within the process chamber of the ion implanter. the calibration jig includes a mounting plate that spans a diameter of the wafer gripper arm, a support stand passing through the mounting plate, and a calibration plate at a bottom end of the support stand. the perimeter of the calibration plate includes a plurality of notches. the calibration plate is rotated. if any finger of the wafer gripper arm falls into a notch, the rotating calibration plate stops. the finger is then adjusted until it does not fall into a notch.