SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

Organization Name

taiwan semiconductor manufacturing co., ltd.

Inventor(s)

Jen-Ti Wang of Taichung City TW

Yi-Ming Chen of Sindian City TW

Chih-Wei Lin of Taichung City TW

Cheng-Ho Hung of Tainan City TW

Fu-Hsien Li of Taichung City TW

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

This abstract first appeared for US patent application 20250100161 titled 'SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

Original Abstract Submitted

a method includes receiving a carrier, the carrier including a carrier body, a first filter, and a housing securing the first filter to the carrier body. the method further includes uninstalling the housing from the carrier, replacing the first filter with a second filter, reinstalling the housing on the carrier body, and inspecting the second filter. inspecting the second filter includes using an automatic inspection mechanism to detect surface flatness of the second filter.