VERTICAL GRATING COUPLER

Organization Name

taiwan semiconductor manufacturing co., ltd.

Inventor(s)

VERTICAL GRATING COUPLER

This abstract first appeared for US patent application 20250093577 titled 'VERTICAL GRATING COUPLER

Original Abstract Submitted

a vertical grating coupler is disclosed. the grating coupler includes a first waveguide having a first grating, a second waveguide having a second grating, and a dielectric layer positioned between the first waveguide and the second waveguide. the first grating includes a plurality of first grating ridges separated by a plurality first grating gaps, and the second grating includes a plurality of second grating ridges separated by a plurality second grating gaps. the first grating, the second grating, and the dielectric layer are located in a vertical overlap region between the first waveguide and the second waveguide. the first grating and the second grating have different grating periods, and each of the plurality of first grating gaps and second grating gaps are filled with the dielectric layer.