Taiwan semiconductor manufacturing co., ltd. (20250092892). GAS TRANSPORT SYSTEM
GAS TRANSPORT SYSTEM
Organization Name
taiwan semiconductor manufacturing co., ltd.
Inventor(s)
GAS TRANSPORT SYSTEM
This abstract first appeared for US patent application 20250092892 titled 'GAS TRANSPORT SYSTEM
Original Abstract Submitted
a conduit system for transporting gas from a gas containing chamber for processing a substrate from which semiconductor devices are formed includes a liner with a spiral vent. the conduit system utilizes a curtain of gas to prevent or reduce deposition of material onto an inner surface of the conduit transporting the gas from the gas containing chamber.