Stmicroelectronics international n.v. (20250003819). ULTRA-COMPACT STACKED DIFFERENTIAL PRESSURE SENSOR
ULTRA-COMPACT STACKED DIFFERENTIAL PRESSURE SENSOR
Organization Name
stmicroelectronics international n.v.
Inventor(s)
Massimiliano Pesaturo of Torre de' Roveri (IT)
Marco Omar Ghidoni of Melzo (IT)
Mikel Azpeitia Urquia of Milano (IT)
ULTRA-COMPACT STACKED DIFFERENTIAL PRESSURE SENSOR
This abstract first appeared for US patent application 20250003819 titled 'ULTRA-COMPACT STACKED DIFFERENTIAL PRESSURE SENSOR
Original Abstract Submitted
an ultra-compact stacked differential pressure sensor is provided, which includes a differential pressure sensor stacked on an asic stacked on a substrate. the differential pressure sensor is connected to the asic by an inner ring and outer ring. the region between the inner ring and outer ring forms an isolation region. the asic may be connected to the substrate with glue. each of the asic and substrate may have a through hole channel and the differential pressure sensor may have a back channel. the differential pressure sensor is exposed to a first pressure on a first side and a second pressure via the differential pressure back channel, the asic channel, and the substrate channel. the differential pressure sensor may generate an electrical signal based on a difference in pressures between the first environment and the second environment.