Sk hynix inc. (20250146967). SEMICONDUCTOR DEVICE INCLUDING CRACK DETECTING CIRCUIT
SEMICONDUCTOR DEVICE INCLUDING CRACK DETECTING CIRCUIT
Organization Name
Inventor(s)
Sun Joo Park of Gyeonggi-do KR
Jeong Woo Hong of Gyeonggi-do KR
SEMICONDUCTOR DEVICE INCLUDING CRACK DETECTING CIRCUIT
This abstract first appeared for US patent application 20250146967 titled 'SEMICONDUCTOR DEVICE INCLUDING CRACK DETECTING CIRCUIT
Original Abstract Submitted
a semiconductor device includes a guard ring, a crack detecting circuit, and a conductive sensing line over a semiconductor substrate. the guard ring is electrically connected to a first impurity-doped region of the semiconductor substrate. the conductive sensing line is disposed at a location isolated from the crack detecting circuit with the guard ring interposed therebetween, and is extended along the guard ring and formed in a shape in which both ends of the conductive sensing line are spaced apart from each other. the semiconductor substrate includes a second impurity-doped region buried in the first impurity-doped region and extended to pass under the guard ring, a third impurity-doped region that penetrates the first impurity-doped region so that the third impurity-doped region electrically connects the conductive sensing line to the second impurity-doped region, and a fourth impurity-doped region that electrically connects the crack detecting circuit to the second impurity-doped region.