Sk hynix inc. (20250070047). SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Yun Cheol Han of Gyeonggi-do (KR)
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250070047 titled 'SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device may include a stack including a chip region and a guard region surrounding the chip region, contact structures positioned in the chip region, and a chip guard structure positioned in the guard region and including first protrusions protruding by a first width and second protrusions protruding by a second width greater than the first width.