Seiko epson corporation (20240258989). VIBRATOR DEVICE
VIBRATOR DEVICE
Organization Name
Inventor(s)
Ryuta Nishizawa of Nagano-shi JP
Junichi Takeuchi of Chino-shi JP
VIBRATOR DEVICE
This abstract first appeared for US patent application 20240258989 titled 'VIBRATOR DEVICE
Original Abstract Submitted
a vibrator device includes: a base including a semiconductor substrate having an integrated circuit disposed at a second surface; a vibration element electrically coupled to the integrated circuit; and a lid having an end surface of a side wall bonded to a first surface at a bonding portion. a first circuit of the integrated circuit includes a first circuit element disposed in a first region overlapping the bonding portion in a plan view. the first circuit element is a passive element or a transistor, and �>90� is satisfied, � being an angle formed by the first surface and an inner side surface of the side wall.