SUBSTRATE PROCESSING APPARATUS

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SUBSTRATE PROCESSING APPARATUS

This abstract first appeared for US patent application 20250144730 titled 'SUBSTRATE PROCESSING APPARATUS

Original Abstract Submitted

a substrate processing apparatus that reduces and/or minimizes contamination of mounting boards. the substrate processing apparatus includes a frame with an opening formed at its bottom and including an internal space; a first plate below the frame; and a second plate below the first plate. the first plate includes a plurality of first holes. the second plate includes a plurality of second holes, and at least one second dam which surrounds at least one of the second holes and protrudes toward the internal space. the first holes are staggered with respect to the second holes in a vertical direction.