Samsung electronics co., ltd. (20250140711). SEMICONDUCTOR DEVICE
SEMICONDUCTOR DEVICE
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SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250140711 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
a semiconductor device may include a substrate including a logic cell region and a key region, an active pattern in the logic cell region, a channel pattern on the active pattern, a plurality of gate electrodes extending on the channel pattern in a first direction and spaced apart from each other in a second direction perpendicular to the first direction, a device separation layer on the key region, and a first key pattern corresponding to the plurality of gate electrodes on the device separation layer.