Samsung electronics co., ltd. (20250132173). SUBSTRATE CLEANING APPARATUS
SUBSTRATE CLEANING APPARATUS
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SUBSTRATE CLEANING APPARATUS
This abstract first appeared for US patent application 20250132173 titled 'SUBSTRATE CLEANING APPARATUS
Original Abstract Submitted
an example substrate cleaning apparatus includes a roll brush that cleans a surface of a substrate. the roll brush includes a drive shaft with a predetermined length and a plurality of brush members positioned around an outside circumference of the drive shaft. one of the plurality of the brush members is provided with a rotation speed lower than the others.