MICROBOLOMETER AND METHOD OF MANUFACTURING THE SAME

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MICROBOLOMETER AND METHOD OF MANUFACTURING THE SAME

This abstract first appeared for US patent application 20250130110 titled 'MICROBOLOMETER AND METHOD OF MANUFACTURING THE SAME

Original Abstract Submitted

a microbolometer and a method of manufacturing the same are provided. the microbolometer may include a substrate, an absorption layer configured to absorb incoming light in a specific wavelength range and including an absorption body configured to float from the substrate and electrically isolated by a channel; a resistance layer provided between the substrate and the absorption body of the absorption layer and having a resistance value that changes based on temperature variations caused by thermal energy absorbed through the absorption layer; and a resistance reduction layer provided between the absorption layer and the resistance layer to reduce interface resistance and divided by a channel correspond to the channel of the absorption layer.