Samsung electronics co., ltd. (20250126917). IMAGE SENSOR
IMAGE SENSOR
Organization Name
Inventor(s)
IMAGE SENSOR
This abstract first appeared for US patent application 20250126917 titled 'IMAGE SENSOR
Original Abstract Submitted
an image sensor includes a semiconductor substrate including a plurality of pixels, a first surface, and a second surface, opposing the first surface, and a device isolation layer in a trench penetrating through the first surface and the second surface of the semiconductor substrate and separating the pixels from each other. the device isolation layer may include a conductive separation layer extending from the first surface to the second surface, an insulating liner interposed between the conductive separation layer and the semiconductor substrate, and a capping separation layer extending in a direction from the second surface to the first surface and contacting the conductive separation layer.