Samsung electronics co., ltd. (20250126872). SEMICONDUCTOR MEMORY DEVICE

SEMICONDUCTOR MEMORY DEVICE

Organization Name

samsung electronics co., ltd.

Inventor(s)

Byeongjun Bae of Suwon-si KR

Youngwoo Son of Suwon-si KR

SEMICONDUCTOR MEMORY DEVICE

This abstract first appeared for US patent application 20250126872 titled 'SEMICONDUCTOR MEMORY DEVICE

Original Abstract Submitted

provided is a semiconductor memory device. the semiconductor memory device includes a plurality of trenches including a plurality of first trenches in a substrate and a plurality of second trenches between ones of the plurality of first trenches, and a plurality of device isolation layers. a first height of a lowermost surface of a direct contact in a vertical direction may be higher than a second height of a lowermost surface of a buried contact in the vertical direction, relative to a lower surface of the substrate.