SEALING RING

Organization Name

samsung electronics co., ltd.

Inventor(s)

Jihwan Kim of Suwon-si, Gyeonggi-do KR

Dongseok Han of Suwon-si, Gyeonggi-do KR

Kyung-Sun Kim of Suwon-si KR

Heewon Min of Suwon-si KR

Mingil Kim of Suwon-si KR

Yirop Kim of Suwon-si KR

Junghyun Song of Suwon-si KR

Kuihyun Yoon of Suwon-si KR

Woojin Jang of Suwon-si KR

Seunghee Cho of Suwon-si KR

SEALING RING

This abstract first appeared for US patent application 20250116332 titled 'SEALING RING

Original Abstract Submitted

a substrate processing apparatus includes an o-ring defined by a central axis, a first guide ring located closer to the central axis than is the o-ring, and a second guide ring located further from the central axis than is the o-ring. a thickness of each of the first guide ring and the second guide ring becomes progressively greater further from the central axis.